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from science to society

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  • Our activities
    • Biomedical
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    • Mecanics
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Cleanroom microtechnologies

MICROFABRICATION- MICRO & NANO TECHNOLOGY

Our team of specialized engineers respond to your specific requests from the feasibility study with the development of processes and prototypes to small series manufacturing with controlled costs, deadlines and quality.

We offer in particular:

  • Bibliographic studies & technological consultations,
  • Development of specific processes,
  • Micro-technology services based on proven know-how,
  • Study of industrialization processes and help technology transfer.

We operate in the MIMENTO technology center in Besançon with high-tech equipment in 1400 m² of clean room(ISO 5 to 7 – ISO 9001) in the fields of micro-mechanics, micro-nano-optics and radio frequency .

Our expertise

Photolithography

UV & electronic lithography Photolithography mask manufacturing

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Deposition

Deposition of thin and thick layers

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Etching

Dry etching (ion plasma): RIE, DRIE FIB (Focus Ion Beam) Materials: Silicon (max 6 inches), Glass, Si3N4, LiNbO3,… (max 4

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Integration & Packaging

Precision cutting ƒƒLapping & polishing ƒƒWire bonding ƒƒWafer bonding ƒƒMicro-assembly (flip-chip)

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Characterisation

Microscope (MEB, optic, FIB), mechanical profilometer Specific measures : material constraints, optical index, contact angle

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Catalog of equipment of the platform MIMENTO

Specific realizations

Optical frequency converter

– PPLN manufacturing
– SHG components

... Read more

SPR chips

– Manufacturing of chips with plasmonic properties (SPR)
– Specific coatings (SiO2, TiO2, etc)
– Biofonctionnalization

... Read more

High resolution molds

– Polymer mold
– Metal mold
– Silicon mold

... Read more

Wafer Hybrid

– Multi-material metallic bonding
– Multi-material thinning
– Multi-material thin layers

... Read more
Services on the platform MIMENTO

Contact us

Florent BASSIGNOT, PhD
Cleanroom Microfabrication Manager
Business Engineer

FEMTO Engineering
Bâtiment TEMIS
15B avenue des Montboucons F-25030 BESANÇON cedex

  • Tél +33 (0)3 81 66 55 83
  • florent.bassignot@femto-engineering.fr

Microfabrication News

JNTE 2022, from november 28 to december 2, Besançon

28 November 2022

Cleanroom microtechnology: an open platform for companies

12 July 2021

MEET US AT TECHINNOV 2020

22 April 2020

MONOCRYSTALLINE THIN FILMS

18 November 2019

Femto Engineering | From science to society
15B avenue des Montboucons, 25030 Besançon Cedex – France

  • 03 63 08 24 14
  • contact@femto-engineering.fr

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