Located at the ENSMM in Besançon, the µROBOTEX platform has been operational since 2014 and managed by the AS2M department of the FEMTO-ST Institute. The platform contains various optical and electronic microscopy devices, 6-axis microbots, laser interferometers and micro and nano-force sensors. μROBOTEX is equipped with a SEM (scanning electron microscope) with a FIB column (etching), a gas injection system (CVD deposition) and micromanipulators in the chamber with 15 axes.
The objective of μROBOTEX is to provide researchers in micro and nanotechnologies with scientific instruments of international level. Combining knowledge of microsystems, physical and chemical phenomena on a nanometric scale, robotics and automation, the μROBOTEX platform offers a unique environment for the automation of micro-assembly and for the characterization of micro and nanosystems. Access to the platform is open to academics and industrial partners for their development and for their research projects.
This platform was funded as part of Investments for the Future (PIA) and by the Bourgogne Franche-Comté region. μROBOTEX is part of the national network of ROBOTEX experimental robotics platforms which constitutes “equipment of excellence” (ANR-10-EQPX-44-01).