FEMTO Engineering is an R&D center of the foundation FC Innov

From science to society

Technological platform

MIMENTO

MIcrofabrication for MEchanics, Nanosciences, Thermics, and Optics

MIMENTO is the microfabrication technology platform of the FEMTO-ST institute. It is certified ISO 9001 and classified ISO 5 to 7. MIMENTO is part of the national RENATECH network, which gathers the major French micromanufacturing platforms that are accessible to manufacturers and research laboratories. FEMTO Engineering has a privileged access to MIMENTO and offers manufacturers custom microfabrication services: process development, manufacturing of MEMS components, micro-mechanical parts, optical components and biomedical devices. The FEMTO Engineering team ensures the interface between industrial needs and the technological capabilities of the platform, from the definition of specifications to the delivery of components.

Salle blanche FEMTO-ST

Access conditions

Services provided by our experts

FEMTO Engineering takes care of the entire project: process definition, manufacturing, quality control and delivery. A turnkey solution for manufacturers without in-house microfabrication skills.

Access to the instrumentation by your teams

Your teams have direct access to MIMENTO’s equipment, with technical support from FEMTO Engineering for the handling and monitoring.

Development of specific processes

FEMTO Engineering develops and optimizes tailored processes adapted to your materials and constraints: Si, glasses, quartz, sapphire, diamond, LN, LT.

Devices

UV and electronic photolithography

UV and LIGA lithography equipment for the definition of micrometric scale patterns.

Dry and wet engraving

RIE, deep DRIE on dielectric materials (glass, Si3N4, LN), FIB, KOH and BHF etching.

Deposits of thin and thick layers

PVD, ICPE CVD for metal (Al, Au, Cr, Ti, Pt, Ni, Cu) and oxide (SiO2, TiO2, ZnO, ZrO2) deposition. Electrodeposition of thick layers, electroforming (Ni, Cu, Au).

Connectivity and packaging

Precision cutting and polishing, wire bonding, wafer bonding, flip-chip microassembly.

Characterization

SEM, AFM, thickness and index measurements by ellipsometry, reflectometry, profilometry, resistivity measurements by tester under HF and BF tips.

Manufacture of composite wafers

Monocrystalline thin films from 1 to 300 μm of silicon, quartz, LN, LT, glass, sapphire on various substrates. Proprietary process ensuring the maintenance of physico-chemical properties.

Performance and capacity

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MEMS and microsystems microfabrication

Manufacture of micro-mechanical parts, sensors, actuators and microelectromechanical systems for industrial and research applications.

Precision optical components

Diffraction gratings, waveguides, ridge structures, PPLN and PPLT components for nonlinear optics and frequency converters.

Biomedical devices

Lab-on-chips, biochips, microreactors, filtration membranes and microfluidic structures in biocompatible materials.

Mechanical and watchmaking micro-parts

Micro-gears, springs, precision parts in Si3N4, quartz and other hard materials for watchmaking and high precision mechanics.

Manufacturing performance

Verticality of the flanks greater than 88°, roughness less than 5 nm, maximum aspect ratio of 400, production of very small and small series.

Contact the department Biomedical