FEMTO Engineering is an R&D center of the foundation FC Innov

From science to society

UV & electronics lithography

  • Spin coating and spraying. Single and double-sided UV aligner
  • Resin: positive & negative, Epoxy (SU-8)

Production of photolithography mask

  • 800 nm resolution
  • Masks sizes: 4, 5, 6 and 7" & direct writing on 3" and 4" wafers
Contact the department Microfabrication in cleanroom