{"id":2761,"date":"2020-04-16T13:23:52","date_gmt":"2020-04-16T11:23:52","guid":{"rendered":"http:\/\/www.femto-engineering.fr\/realisation\/etching\/"},"modified":"2021-09-07T10:06:13","modified_gmt":"2021-09-07T08:06:13","slug":"etching","status":"publish","type":"realisation","link":"https:\/\/www.femto-engineering.fr\/en\/realisation\/etching\/","title":{"rendered":"Etching"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\"><b>Dry etching (ion plasma): <\/b><\/p>\n\n<ul class=\"wp-block-list\"><li>RIE, DRIE<\/li><li>FIB (Focus Ion Beam)<\/li><li>Materials: Silicon (max 6 inches), Glass, Si3N4, LiNbO3,\u2026 (max 4 inches)<\/li><\/ul>\n<p class=\"wp-block-paragraph\"><\/p>\n\n<p class=\"wp-block-paragraph\"><strong>Wet etching:<\/strong><\/p>\n\n<ul class=\"wp-block-list\"><li>KOH, BHF<\/li><li>Vapor HF Etching<\/li><\/ul>\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Dry etching (ion plasma): RIE, DRIE FIB (Focus Ion Beam) Materials: Silicon (max 6 inches), Glass, Si3N4, LiNbO3,\u2026 (max 4 inches) Wet etching: KOH, BHF Vapor HF Etching<\/p>\n","protected":false},"featured_media":2497,"parent":0,"template":"","categories":[77],"tags":[],"class_list":["post-2761","realisation","type-realisation","status-publish","has-post-thumbnail","hentry","category-microfabrication-en"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/realisation\/2761","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/realisation"}],"about":[{"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/types\/realisation"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/media\/2497"}],"wp:attachment":[{"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/media?parent=2761"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/categories?post=2761"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.femto-engineering.fr\/en\/wp-json\/wp\/v2\/tags?post=2761"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}